Green CVD: How Sustainable is Thin Film Deposition? - ALD Stories Ep. 7

Professors Henrik Pedersen, Sean Barry, and Jonas Sundqvist join Tyler to discuss their recent publication in JVSTA about Green CVD. The trio talk about the conception of a new research field which concerns creating more sustainable thin film deposition practices without sacrificing film quality and offers some perspective on a number of areas and strategies addressed in the manuscript. Read the paper here: https://avs.scitation.org/doi/10.1116/6.0001125