Area-Selective Approaches for Atomic Layer Processing with Mikko Ritala – ALD Stories Ep 10

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In the 10th installment of ALD Stories, Tyler meets up with Professor Mikko Ritala at the University of Helsinki. A professor of chemistry and renowned ALD scientist, Mikko has been working with ALD since the 90s. Following a stellar lab tour, Tyler and Mikko discuss ALD activities at the University of Helsinki, including their new tools, work on area-selective processing and partnership with ASM Microchemistry.     In this video:  00:00 – Intro  02:30 – The Ritala Lab  09:33 – ALD in the Past  17:05 – Helsinki ALD Cluster Tool  24:26 – Area-Selective ALD & ALE  43:36 – Partnership with ASM  47:49 – Ending & Outro    Follow Mikko and the Helsinki ALD Group on Twitter at @mikkoritala & @HelsinkiALD  Read about the Helsinki ALD Group’s work here: https://www2.helsinki.fi/en/researchgroups/helsinkiald  Follow Tyler on Twitter @TyMyTheALDGuy 

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